Publication:
Influence of process-induced stress on device characteristics and its impact on scaled device performance
Date
| dc.contributor.author | Smeys, Peter | |
| dc.contributor.author | Griffin, P. B. | |
| dc.contributor.author | Rek, Z. U. | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.author | Saraswat, K. C. | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-14T11:39:36Z | |
| dc.date.available | 2021-10-14T11:39:36Z | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3834 | |
| dc.source.beginpage | 1245 | |
| dc.source.endpage | 1252 | |
| dc.source.issue | 6 | |
| dc.source.journal | IEEE Trans. Electron Devices | |
| dc.source.volume | 46 | |
| dc.title | Influence of process-induced stress on device characteristics and its impact on scaled device performance | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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