Publication:

Advanced experimental BEOL stability test: measurements and simulations

Date

2014
Proceedings Paper
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dc.contributor.authorVanstreels, Kris
dc.contributor.authorCherman, Vladimir
dc.contributor.authorGonzalez, Mario
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorVan der Plas, Geert
dc.contributor.authorDe Vos, Joeri
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorTokei, Zsolt
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.imecauthorGonzalez, Mario
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorVan der Plas, Geert
dc.contributor.imecauthorDe Vos, Joeri
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecVan der Plas, Geert::0000-0002-4975-6672
dc.contributor.orcidimecDe Vos, Joeri::0000-0002-9332-9336
dc.date.accessioned2021-10-22T07:38:00Z
dc.date.available2021-10-22T07:38:00Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24745
dc.identifier.urlhttp://www.mam-conference.org/MAM2014/Programm%20MAM%202014_v7.pdf
dc.source.conferenceMaterials for Advanced Metallization Conference - MAM
dc.source.conferencedate2/03/2013
dc.source.conferencelocationChemnitz Germany
dc.title

Advanced experimental BEOL stability test: measurements and simulations

dc.typeProceedings paper
dspace.entity.typePublication
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