Publication:

Low-loss α-tantalum coplanar waveguide resonators on silicon wafers: fabrication, characterization and surface modification

Date

2024-JUN 1
Journal article
https://doi.org/10.1088/2633-4356/ad4b8c
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dc.contributor.authorPerez Lozano, Daniel
dc.contributor.authorMongillo, Massimo
dc.contributor.authorPiao, Xiaoyu
dc.contributor.authorCouet, Sebastien
dc.contributor.authorWan, Danny
dc.contributor.authorCanvel, Yann
dc.contributor.authorAnanthapadmanabha Rao, Vadiraj
dc.contributor.authorIvanov, Tsvetan
dc.contributor.authorVerjauw, Jeroen
dc.contributor.authorAcharya, Rohith
dc.contributor.authorVan Damme, Jacques
dc.contributor.authorMohiyaddin, Fahd Ayyalil
dc.contributor.authorJussot, Julien
dc.contributor.authorPuttarame Gowda, Pallavi
dc.contributor.authorPacco, Antoine
dc.contributor.authorRaes, B.
dc.contributor.authorvan de Vondel, J.
dc.contributor.authorRadu, Iuliana
dc.contributor.authorGovoreanu, Bogdan
dc.contributor.authorSwerts, Johan
dc.contributor.imecauthorLozano, D. P.
dc.contributor.imecauthorMongillo, M.
dc.contributor.imecauthorPiao, X.
dc.contributor.imecauthorCouet, S.
dc.contributor.imecauthorWan, D.
dc.contributor.imecauthorCanvel, Y.
dc.contributor.imecauthorVadiraj, A. M.
dc.contributor.imecauthorIvanov, Ts
dc.contributor.imecauthorVerjauw, J.
dc.contributor.imecauthorAcharya, R.
dc.contributor.imecauthorVan Damme, J.
dc.contributor.imecauthorMohiyaddin, F. A.
dc.contributor.imecauthorJussot, J.
dc.contributor.imecauthorGowda, P. P.
dc.contributor.imecauthorPacco, A.
dc.contributor.imecauthorRadu, I. P.
dc.contributor.imecauthorGovoreanu, B.
dc.contributor.imecauthorSwerts, J.
dc.contributor.imecauthorPotocnik, A.
dc.contributor.imecauthorDe Greve, K.
dc.date.accessioned2024-10-30T17:13:38Z
dc.date.available2024-10-30T17:13:38Z
dc.date.issued2024-JUN 1
dc.description.wosFundingTextThis project leading to this application has received funding from the ECSEL Joint Undertaking (JU) under Grant Agreement No. 101007322. The JU receives support from the European Union's Horizon 2020 research and innovation program and Germany, France, Belgium, Austria, Netherlands, Finland, Israel. (Please visit the project websitewww.matqu.eufor more information). This work was supported by imec's Industrial Affiliation Program on Quantum Computing.
dc.identifier.doi10.1088/2633-4356/ad4b8c
dc.identifier.issn2633-4356
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44705
dc.publisherIOP Publishing Ltd
dc.source.beginpage025801
dc.source.issue2
dc.source.journalMATERIALS FOR QUANTUM TECHNOLOGY
dc.source.numberofpages10
dc.source.volume4
dc.subject.keywordsSUPERCONDUCTING CIRCUITS
dc.subject.keywordsTUNNEL-JUNCTIONS
dc.subject.keywordsTA
dc.subject.keywordsRESISTIVITY
dc.subject.keywordsNIOBIUM
dc.subject.keywordsFILMS
dc.subject.keywordsNB
dc.title

Low-loss α-tantalum coplanar waveguide resonators on silicon wafers: fabrication, characterization and surface modification

dc.typeJournal article
dspace.entity.typePublication
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