Publication:
Polycrystalline silicon in ULSI
Date
| dc.contributor.author | Ghannam, Moustafa | |
| dc.contributor.author | Mertens, Robert | |
| dc.contributor.imecauthor | Ghannam, Moustafa | |
| dc.contributor.imecauthor | Mertens, Robert | |
| dc.date.accessioned | 2021-10-14T18:38:18Z | |
| dc.date.available | 2021-10-14T18:38:18Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5904 | |
| dc.source.beginpage | 7152 | |
| dc.source.book | Encyclopedia of Materials: Science and Technology | |
| dc.source.endpage | 7158 | |
| dc.title | Polycrystalline silicon in ULSI | |
| dc.type | Book chapter | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |