Publication:

Effect of electron irradiation on thermal donors in oxygen-doped high-resistivity FZ Si

Date

2004
Proceedings Paper
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dc.contributor.authorTakakura, K.
dc.contributor.authorOhyama, H.
dc.contributor.authorYoshida, T.
dc.contributor.authorMurakawa, H.
dc.contributor.authorRafi, Joan Marc
dc.contributor.authorJob, R.
dc.contributor.authorUlyashin, A.
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.accessioned2021-10-15T16:34:15Z
dc.date.available2021-10-15T16:34:15Z
dc.date.embargo9999-12-31
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9663
dc.source.beginpage53
dc.source.conferenceGettering and Defect Engineering in Semiconductor Technology - GADEST 2003
dc.source.conferencedate21/09/2003
dc.source.conferencelocationBerlin Germany
dc.source.endpage58
dc.title

Effect of electron irradiation on thermal donors in oxygen-doped high-resistivity FZ Si

dc.typeProceedings paper
dspace.entity.typePublication
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