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An O/E measurement probe based on an optics-extended MCM-D motherboard technology

Date

2002
Proceedings Paper
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dc.contributor.authorDe Pauw, Herbert
dc.contributor.authorDe Baets, Johan
dc.contributor.authorVanfleteren, Jan
dc.contributor.authorVan Calster, Andre
dc.contributor.imecauthorDe Pauw, Herbert
dc.contributor.imecauthorDe Baets, Johan
dc.contributor.imecauthorVanfleteren, Jan
dc.contributor.imecauthorVan Calster, Andre
dc.contributor.orcidimecVanfleteren, Jan::0000-0002-9654-7304
dc.date.accessioned2021-10-14T21:23:40Z
dc.date.available2021-10-14T21:23:40Z
dc.date.embargo9999-12-31
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6210
dc.source.beginpage936
dc.source.conferenceProceedings 35th International Symposium on Microelectronics - IMAPS
dc.source.conferencedate4/09/2002
dc.source.conferencelocationDenver, CO USA
dc.source.endpage941
dc.title

An O/E measurement probe based on an optics-extended MCM-D motherboard technology

dc.typeProceedings paper
dspace.entity.typePublication
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