Effect of airgap deep trench isolation on the gamma radiation behavior of a 0.13 μm SiGe:C NPN HBT technology

dc.contributor.author	Put, Sofie
dc.contributor.author	Simoen, Eddy
dc.contributor.author	Van Huylenbroeck, Stefaan
dc.contributor.author	Claeys, Cor
dc.contributor.author	Van Uffelen, Nick
dc.contributor.author	Leroux, P.
dc.contributor.imecauthor	Simoen, Eddy
dc.contributor.imecauthor	Van Huylenbroeck, Stefaan
dc.contributor.orcidimec	Simoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimec	Van Huylenbroeck, Stefaan::0000-0001-9978-3575
dc.date.accessioned	2021-10-17T10:01:41Z
dc.date.available	2021-10-17T10:01:41Z
dc.date.embargo	9999-12-31
dc.date.issued	2008
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/14347
dc.source.beginpage	426
dc.source.conference	8th European Workshop on Radiation Effects on Components and Systems - RADECS
dc.source.conferencedate	10/09/2008
dc.source.conferencelocation	Jyväskylä Finland
dc.source.endpage	431
dc.title	Effect of airgap deep trench isolation on the gamma radiation behavior of a 0.13 μm SiGe:C NPN HBT technology
dc.type	Proceedings paper
dspace.entity.type	Publication
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