Publication:

CMOS compatible heater fabrication approaches for thermal tuning of photonics devices

Date

2012
Proceedings Paper
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dc.contributor.authorMasood, Adil
dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorGoossens, Danny
dc.contributor.authorLepage, Guy
dc.contributor.authorVerheyen, Peter
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorAbsil, Philippe
dc.contributor.authorBogaerts, Wim
dc.contributor.imecauthorMasood, Adil
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorGoossens, Danny
dc.contributor.imecauthorLepage, Guy
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.date.accessioned2021-10-20T13:21:02Z
dc.date.available2021-10-20T13:21:02Z
dc.date.embargo9999-12-31
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21119
dc.source.beginpage307
dc.source.conferenceProceedings of the Annual Symposium of the IEEE Photonics Society Benelux Chapter
dc.source.conferencedate29/11/2012
dc.source.conferencelocationMons Belgium
dc.source.endpage310
dc.title

CMOS compatible heater fabrication approaches for thermal tuning of photonics devices

dc.typeProceedings paper
dspace.entity.typePublication
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