Publication:
Comparison of standard macroscopic and Conductive AFM leakage measurements on gate removed high-k capacitors
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1973 since deposited on 2021-10-17
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Acq. date: 2026-10-04
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Statistics
Views
1973 since deposited on 2021-10-17
1last month
1last week
Acq. date: 2026-10-04
Citations