Publication:
Comparison of standard macroscopic and Conductive AFM leakage measurements on gate removed high-k capacitors
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1969 since deposited on 2021-10-17
1last month
Acq. date: 2026-02-25
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Statistics
Views
1969 since deposited on 2021-10-17
1last month
Acq. date: 2026-02-25
Citations