Heavily phosphorus doped germanium: strong relationship of phosphorus with vacancies and impact of Sn alloying on doping activation

Vohra, Anurag; Khanam, Afrina; Slotte, Jonatan; Makkonen, Ilja; Pourtois, Geoffrey; Porret, Clément; Loo, Roger; Vandervorst, Wilfried

doi:10.1063/1.5107503

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Heavily phosphorus doped germanium: strong relationship of phosphorus with vacancies and impact of Sn alloying on doping activation

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2019

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https://doi.org/10.1063/1.5107503

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Vandervorst, Wilfried

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Journal of Applied Physics

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Heavily phosphorus doped germanium: strong relationship of phosphorus with vacancies and impact of Sn alloying on doping activation

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