Publication:

Reliability of Porous Dielectrics

Date

2005
Presentation
Simple item page Full metadata Statistics
 
dc.contributor.authorBeyer, Gerald
dc.contributor.authorSchaekers, Marc
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.date.accessioned2021-10-16T00:46:07Z
dc.date.available2021-10-16T00:46:07Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10096
dc.source.conferenceSemicon Europe
dc.source.conferencedate12/04/2005
dc.source.conferencelocationMünchen Germany
dc.title

Reliability of Porous Dielectrics

dc.typeOral presentation
dspace.entity.typePublication
Files
Publication available in collections:
Presentations