Publication:

Modeling of bombardment induced oxidation of silicon with and without oxygen flooding

Date

1997
Presentation
Simple item page Full metadata Statistics
 
dc.contributor.authorDe Witte, Hilde
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorGijbels, Renaat
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-09-30T08:07:27Z
dc.date.available2021-09-30T08:07:27Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1824
dc.source.conferenceSIMS XI; 8-12 September 1997; Orlando, Calif., USA.
dc.source.conferencelocation
dc.title

Modeling of bombardment induced oxidation of silicon with and without oxygen flooding

dc.typeOral presentation
dspace.entity.typePublication
Files
Publication available in collections:
Presentations