Publication:

Buried power rail integration with FinFETs for ultimate CMOS scaling

Date

2020
Journal article
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dc.contributor.authorGupta, Anshul
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorArutchelvan, Goutham
dc.contributor.authorZahedmanesh, Houman
dc.contributor.authorDevriendt, Katia
dc.contributor.authorHanssen, Frederik
dc.contributor.authorTao, Zheng
dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorWang, Shouhua
dc.contributor.authorRadisic, Dunja
dc.contributor.authorKenis, Karine
dc.contributor.authorTeugels, Lieve
dc.contributor.authorSebaai, Farid
dc.contributor.authorLorant, Christophe
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorChan, BT
dc.contributor.authorSubramanian, Sujith
dc.contributor.authorSchleicher, Filip
dc.contributor.authorHopf, Toby
dc.contributor.authorPeter, Antony
dc.contributor.imecauthorGupta, Anshul
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorArutchelvan, Goutham
dc.contributor.imecauthorZahedmanesh, Houman
dc.contributor.imecauthorDevriendt, Katia
dc.contributor.imecauthorHanssen, Frederik
dc.contributor.imecauthorTao, Zheng
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorWang, Shouhua
dc.contributor.imecauthorRadisic, Dunja
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorSebaai, Farid
dc.contributor.imecauthorLorant, Christophe
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorSubramanian, Sujith
dc.contributor.imecauthorSchleicher, Filip
dc.contributor.imecauthorHopf, Toby
dc.contributor.imecauthorPeter, Antony
dc.contributor.orcidimecDevriendt, Katia::0000-0002-0662-7926
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecWang, Shouhua::0000-0002-9105-8552
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.contributor.orcidimecLorant, Christophe::0000-0001-7363-9348
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.contributor.orcidimecSubramanian, Sujith::0000-0001-8938-9750
dc.contributor.orcidimecSchleicher, Filip::0000-0003-3630-7285
dc.contributor.orcidimecRassoul, Nouredine::0000-0001-9489-3396
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.contributor.orcidimecDe Keersgieter, An::0000-0002-5527-8582
dc.contributor.orcidimecBoccardi, Guillaume::0000-0003-3226-4572
dc.contributor.orcidimecSepulveda Marquez, Alfonso::0000-0003-4726-177X
dc.contributor.orcidimecMertens, Sofie::0000-0002-1482-6730
dc.contributor.orcidimecKim, Min-Soo::0000-0003-0211-0847
dc.contributor.orcidimecDupuy, Emmanuel::0000-0003-3341-1618
dc.contributor.orcidimecLazzarino, Frederic::0000-0001-7961-9727
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecMorin, Pierre::0000-0002-4637-496X
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.date.accessioned2021-10-28T22:13:11Z
dc.date.available2021-10-28T22:13:11Z
dc.date.issued2020
dc.identifier.issn0018-9383
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35217
dc.identifier.urlhttps://ieeexplore.ieee.org/document/9257401
dc.source.beginpage5349
dc.source.endpage5354
dc.source.issue12
dc.source.journalIEEE Transactions on Electron Devices
dc.source.volume67
dc.title

Buried power rail integration with FinFETs for ultimate CMOS scaling

dc.typeJournal article
dspace.entity.typePublication
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