Publication:
Effect of helium plasma on low-k damage during dry resist strip
Date
| dc.contributor.author | Urbanowicz, Adam | |
| dc.contributor.author | Shamiryan, Denis | |
| dc.contributor.author | Kim, Dongchan | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.date.accessioned | 2021-10-16T20:22:32Z | |
| dc.date.available | 2021-10-16T20:22:32Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13007 | |
| dc.identifier.url | http://www.pesm2007.be/ | |
| dc.source.conference | 1st International Workshop Plasma Etch and Strip in Microelectronics - PESM | |
| dc.source.conferencedate | 10/09/2007 | |
| dc.source.conferencelocation | Leuven Belgium | |
| dc.title | Effect of helium plasma on low-k damage during dry resist strip | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |