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A chemisorbed interfacial layer for seeding atomic layer deposition on graphite

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dc.contributor.authorBrown, Anton
dc.contributor.authorGreenwood, John
dc.contributor.authorLockhart de la Rosa, Cesar Javier
dc.contributor.authorGonzalez, Miriam C. Rodriguez
dc.contributor.authorVerguts, Ken
dc.contributor.authorBrems, Steven
dc.contributor.authorZhang, Haodong
dc.contributor.authorHirsch, Brandon E.
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorDelabie, Annelies
dc.contributor.authorCaymax, Matty
dc.contributor.authorTeyssandier, Joan
dc.contributor.authorDe Feyter, Steven
dc.contributor.imecauthorLockhart de la Rosa, Cesar Javier
dc.contributor.imecauthorVerguts, Ken
dc.contributor.imecauthorBrems, Steven
dc.contributor.imecauthorZhang, Haodong
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidextGonzalez, Miriam C. Rodriguez::0000-0002-7084-1599
dc.contributor.orcidimecBrems, Steven::0000-0002-0282-8528
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecLockhart de la Rosa, Cesar Javier::0000-0002-1401-0141
dc.contributor.orcidimecDelabie, Annelies::0000-0001-9739-7419
dc.date.accessioned2022-02-07T10:35:00Z
dc.date.available2021-11-02T16:00:06Z
dc.date.available2022-02-07T10:35:00Z
dc.date.issued2021
dc.identifier.doi10.1039/d0nr06959k
dc.identifier.issn2040-3364
dc.identifier.pmidMEDLINE:34254598
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/37802
dc.publisherROYAL SOC CHEMISTRY
dc.source.beginpage12327
dc.source.endpage12341
dc.source.issue28
dc.source.journalNANOSCALE
dc.source.numberofpages15
dc.source.volume13
dc.subject.keywordsHIGH-KAPPA DIELECTRICS
dc.subject.keywordsCOVALENT FUNCTIONALIZATION
dc.subject.keywordsPOLYMER BRUSHES
dc.subject.keywordsARYL RADICALS
dc.subject.keywordsGRAPHENE
dc.subject.keywordsCARBON
dc.subject.keywordsOXIDE
dc.subject.keywordsSPECTROSCOPY
dc.subject.keywordsMONOLAYER
dc.subject.keywordsCHEMISTRY
dc.title

A chemisorbed interfacial layer for seeding atomic layer deposition on graphite

dc.typeJournal article
dspace.entity.typePublication
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