Publication:

Interface passivation mechanisms in metal gated oxide capacitors

Date

2004-11
Proceedings Paper
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dc.contributor.authorLujan, Guilherme
dc.contributor.authorSchram, Tom
dc.contributor.authorSjoblom, G.
dc.contributor.authorWitters, Thomas
dc.contributor.authorKubicek, Stefan
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHeyns, Marc
dc.contributor.authorDe Meyer, Kristin
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorWitters, Thomas
dc.contributor.imecauthorKubicek, Stefan
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-15T14:34:33Z
dc.date.available2021-10-15T14:34:33Z
dc.date.issued2004-11
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9228
dc.source.beginpage325
dc.source.conferenceProceedings of the 34th European Solid-State Device Research Conference - ESSDERC
dc.source.conferencedate20/09/2004
dc.source.conferencelocationLeuven Belgium
dc.source.endpage328
dc.title

Interface passivation mechanisms in metal gated oxide capacitors

dc.typeProceedings paper
dspace.entity.typePublication
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