Recent progress and insights in two-dimensional carrier profiling using scanning spreading resistance microscopy

dc.contributor.author	Eyben, Pierre
dc.contributor.author	Alvarez, David
dc.contributor.author	Clarysse, Trudo
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.imecauthor	Eyben, Pierre
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.date.accessioned	2021-10-15T04:38:58Z
dc.date.available	2021-10-15T04:38:58Z
dc.date.issued	2003
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/7558
dc.source.beginpage	685
dc.source.conference	Characterization and Metrology for ULSI Technology
dc.source.conferencedate	24/03/2003
dc.source.conferencelocation	Austin, Texas USA
dc.source.endpage	694
dc.title	Recent progress and insights in two-dimensional carrier profiling using scanning spreading resistance microscopy
dc.type	Proceedings paper
dspace.entity.type	Publication
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