Publication:
Narrow trench corrosion
Date
| dc.contributor.author | Ernur, Didem | |
| dc.contributor.author | Kondo, Seiichi | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Ernur, Didem | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-14T16:54:32Z | |
| dc.date.available | 2021-10-14T16:54:32Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5280 | |
| dc.source.conference | Advanced Metallization Conference; 9-11 October 2001; Montreal, Canada. | |
| dc.source.conferencelocation | ||
| dc.title | Narrow trench corrosion | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |