Publication:
Challenges of dense and isolated structure patterning: depth loading study in STI
Date
| dc.contributor.author | Song, Yang | |
| dc.contributor.author | Milenin, Alexey | |
| dc.contributor.imecauthor | Milenin, Alexey | |
| dc.contributor.orcidimec | Milenin, Alexey::0000-0003-0747-0462 | |
| dc.date.accessioned | 2021-10-22T06:03:08Z | |
| dc.date.available | 2021-10-22T06:03:08Z | |
| dc.date.issued | 2014 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/24551 | |
| dc.identifier.url | http://pesm2014.insight-outside.fr/index.php?langue=en&onglet=14&acces=&idUser=&emailUser=&PHPSESSID=a3ab919ce7af5a185bc62c2cbd6 | |
| dc.source.conference | Plasma Etch and Strip in Microtechnology - PESM | |
| dc.source.conferencedate | 12/05/2014 | |
| dc.source.conferencelocation | Grenoble France | |
| dc.title | Challenges of dense and isolated structure patterning: depth loading study in STI | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |