Publication:
Materials characterization for deep submicron technology
Date
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-14T23:43:49Z | |
| dc.date.available | 2021-10-14T23:43:49Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6979 | |
| dc.source.conference | Institute for Microelectronics - IME | |
| dc.source.conferencedate | 27/08/2002 | |
| dc.source.conferencelocation | Singapore | |
| dc.title | Materials characterization for deep submicron technology | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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