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A novel approach of using STM and NC-AFM to study narrow trenches in an oxide matrix

Date

2014
Meeting abstract
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dc.contributor.authorMannarino, Manuel
dc.contributor.authorChintala, Ravi Chandra
dc.contributor.authorEyben, Pierre
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorMannarino, Manuel
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-22T03:27:04Z
dc.date.available2021-10-22T03:27:04Z
dc.date.embargo9999-12-31
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24196
dc.source.beginpagePT28
dc.source.conference17th International Conference on Non-Contact Atomic Force Microscopy - NC-AFM
dc.source.conferencedate4/08/2014
dc.source.conferencelocationTsukuba Japan
dc.title

A novel approach of using STM and NC-AFM to study narrow trenches in an oxide matrix

dc.typeMeeting abstract
dspace.entity.typePublication
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