Publication:

A comparative study of acoustic isolation configurations for pMUT array-based applications

Date

2021
Proceedings Paper
https://doi.org/10.1109/EuroSimE52062.2021.9410867
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dc.contributor.authorVysotskyi, Bogdan
dc.contributor.authorHaouari, Rachid
dc.contributor.authorWeekers, Bart
dc.contributor.authorKeulemans, Grim
dc.contributor.authorRochus, Veronique
dc.contributor.authorBrondani Torri, Guilherme
dc.contributor.imecauthorVysotskyi, Bogdan
dc.contributor.imecauthorHaouari, Rachid
dc.contributor.imecauthorWeekers, Bart
dc.contributor.imecauthorKeulemans, Grim
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorBrondani Torri, Guilherme
dc.contributor.orcidimecVysotskyi, Bogdan::0000-0003-4050-6236
dc.contributor.orcidimecWeekers, Bart::0000-0001-5949-8411
dc.contributor.orcidimecKeulemans, Grim::0000-0001-6896-7275
dc.contributor.orcidimecRochus, Veronique::0000-0001-9680-5724
dc.contributor.orcidimecBrondani Torri, Guilherme::0000-0002-5450-658X
dc.contributor.orcidimecHaouari, Rachid::0000-0003-4809-2023
dc.date.accessioned2022-05-10T09:04:28Z
dc.date.available2021-11-02T15:55:10Z
dc.date.available2022-05-06T11:59:03Z
dc.date.available2022-05-10T09:04:28Z
dc.date.embargo9999-12-31
dc.date.issued2021
dc.identifier.doi10.1109/EuroSimE52062.2021.9410867
dc.identifier.eisbn978-1-6654-1373-2
dc.identifier.isbn978-1-6654-1373-2
dc.identifier.issnna
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/37434
dc.publisherIEEE
dc.source.conference22nd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
dc.source.conferencedateAPR 19-22, 2021
dc.source.conferencelocationOnline
dc.source.journalna
dc.source.numberofpages5
dc.title

A comparative study of acoustic isolation configurations for pMUT array-based applications

dc.typeProceedings paper
dspace.entity.typePublication
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