Publication:
Physical properties of polycrystalline aluminium nitride films deposited by magnetron sputtering
Date
| dc.contributor.author | Mortet, V. | |
| dc.contributor.author | Nesladek, Milos | |
| dc.contributor.author | Haenen, K. | |
| dc.contributor.author | Morel, A. | |
| dc.contributor.author | D'Olieslaeger, Marc | |
| dc.contributor.author | Vanecek, M. | |
| dc.contributor.imecauthor | Nesladek, Milos | |
| dc.contributor.imecauthor | D'Olieslaeger, Marc | |
| dc.date.accessioned | 2021-10-15T14:59:32Z | |
| dc.date.available | 2021-10-15T14:59:32Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9325 | |
| dc.source.beginpage | 1120 | |
| dc.source.endpage | 1124 | |
| dc.source.issue | 4_8 | |
| dc.source.journal | Diamond and Related Materials | |
| dc.source.volume | 13 | |
| dc.title | Physical properties of polycrystalline aluminium nitride films deposited by magnetron sputtering | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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