Energy distribution of positive charges in gate dielectric: probing technique and impacts of different defects

dc.contributor.author	Hatta, S. W. M.
dc.contributor.author	Ji, J.
dc.contributor.author	Zhang, J. F.
dc.contributor.author	Duan, M.
dc.contributor.author	Zhang, W. D.
dc.contributor.author	Soin, N.
dc.contributor.author	Kaczer, Ben
dc.contributor.author	De Gendt, Stefan
dc.contributor.author	Groeseneken, Guido
dc.contributor.imecauthor	Kaczer, Ben
dc.contributor.imecauthor	De Gendt, Stefan
dc.contributor.imecauthor	Groeseneken, Guido
dc.contributor.orcidimec	Kaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimec	De Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned	2021-10-21T08:09:41Z
dc.date.available	2021-10-21T08:09:41Z
dc.date.issued	2013
dc.identifier.issn	0018-9383
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/22464
dc.source.beginpage	1745
dc.source.endpage	1753
dc.source.issue	5
dc.source.journal	IEEE Transactions on Electron Devices
dc.source.volume	60
dc.title	Energy distribution of positive charges in gate dielectric: probing technique and impacts of different defects
dc.type	Journal article
dspace.entity.type	Publication
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