Publication:
Scanning probes for nanometer scale characterization of semiconductor structures
Date
| dc.contributor.author | Hantschel, Thomas | |
| dc.contributor.imecauthor | Hantschel, Thomas | |
| dc.contributor.orcidimec | Hantschel, Thomas::0000-0001-9476-4084 | |
| dc.date.accessioned | 2021-10-14T13:02:57Z | |
| dc.date.available | 2021-10-14T13:02:57Z | |
| dc.date.issued | 2000-12 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4419 | |
| dc.title | Scanning probes for nanometer scale characterization of semiconductor structures | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | ||
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