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Alternative metal recess for fully-self-aligned-vias
Publication:
Alternative metal recess for fully-self-aligned-vias
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Date
2020
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Contino, Antonino
;
Le, Quoc Toan
;
Sakamoto, Kei
;
Schleicher, Filip
;
Paolillo, Sara
;
Pacco, Antoine
;
Kesters, Els
;
Lorant, Christophe
;
Murdoch, Gayle
;
Lariviere, Stephane
;
Vega Gonzalez, Victor
;
Versluijs, Janko
;
Jaenen, Patrick
;
Teugels, Lieve
;
van der Veen, Marleen
;
Jourdan, Nicolas
;
Ciofi, Ivan
;
Boccardi, Guillaume
;
Tokei, Zsolt
;
Wilson, Chris
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2179
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Acq. date: 2026-01-06
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Views
2179
since deposited on 2021-10-28
1
last month
Acq. date: 2026-01-06
Citations