Publication:

Alternative metal recess for fully-self-aligned-vias

Date

2020
Meeting abstract
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Author(s)

Contino, Antonino  
;
Le, Quoc Toan  
;
Sakamoto, Kei  
;
Schleicher, Filip  
;
Paolillo, Sara  
;
Pacco, Antoine  
;
Kesters, Els  
;
Lorant, Christophe  
;
Murdoch, Gayle  
;
Lariviere, Stephane  
;
Vega Gonzalez, Victor  
;
Versluijs, Janko  
;
Jaenen, Patrick  
;
Teugels, Lieve  
;
van der Veen, Marleen  
;
Jourdan, Nicolas  
;
Ciofi, Ivan  
;
Boccardi, Guillaume  
;
Tokei, Zsolt  
;
Wilson, Chris  

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Abstract

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2185 since deposited on 2021-10-28
Acq. date: 2026-09-14

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2185 since deposited on 2021-10-28
Acq. date: 2026-09-14

Citations