Publication:
Special Section Guest Editorial: Advances in E-Beam Metrology
| dc.contributor.author | Lorusso, Gian | |
| dc.contributor.author | Mack, Chris A. | |
| dc.contributor.imecauthor | Lorusso, Gian | |
| dc.date.accessioned | 2023-11-20T08:07:54Z | |
| dc.date.available | 2023-08-27T17:28:48Z | |
| dc.date.available | 2023-11-20T08:07:54Z | |
| dc.date.issued | 2023 | |
| dc.identifier.doi | 10.1117/1.JMM.22.2.021001 | |
| dc.identifier.issn | 1932-5150 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/42405 | |
| dc.publisher | SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS | |
| dc.source.beginpage | Art. 021001 | |
| dc.source.endpage | na | |
| dc.source.issue | 2 | |
| dc.source.journal | JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3 | |
| dc.source.numberofpages | 1 | |
| dc.source.volume | 22 | |
| dc.title | Special Section Guest Editorial: Advances in E-Beam Metrology | |
| dc.type | Editorial material | |
| dspace.entity.type | Publication | |
| Files | ||
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