Towards Improving Challenging Stochastic Defect Detection in SEM Images Based on Improved YOLOv5

dc.contributor.author	Dey, Bappaditya
dc.contributor.author	Dehaerne, Enrique
dc.contributor.author	Halder, Sandip
dc.contributor.imecauthor	Dey, Bappaditya
dc.contributor.imecauthor	Dehaerne, Enrique
dc.contributor.imecauthor	Halder, Sandip
dc.contributor.orcidimec	Dey, Bappaditya::0000-0002-0886-137X
dc.contributor.orcidimec	Halder, Sandip::0000-0002-6314-2685
dc.date.accessioned	2023-06-14T09:47:51Z
dc.date.available	2023-02-15T03:23:33Z
dc.date.available	2023-02-16T15:54:35Z
dc.date.available	2023-06-14T09:47:51Z
dc.date.issued	2022
dc.identifier.doi	10.1117/12.2645402
dc.identifier.eisbn	978-1-5106-5642-0
dc.identifier.issn	0277-786X
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/41095
dc.publisher	SPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpage	Art. 1229305
dc.source.conference	Photomask Technology Conference
dc.source.conferencedate	SEP 26-29, 2022
dc.source.conferencelocation	Monterey
dc.source.journal	Proceedings of SPIE
dc.source.numberofpages	10
dc.source.volume	12293
dc.title	Towards Improving Challenging Stochastic Defect Detection in SEM Images Based on Improved YOLOv5
dc.type	Proceedings paper
dspace.entity.type	Publication
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