Publication:

Optimisation of active area edge protection in shallow trench isolation

Date

2001

Proceedings Paper

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Author(s)

Augendre, Emmanuel

;

Rooyackers, Rita

;

Pochet, Sandrine

;

Grau, Lluis

;

;

Vandamme, Ewout

;

Badenes, Gonçal

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1952 since deposited on 2021-10-14

Acq. date: 2026-06-21