Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
Effect of anions on copper outplating from HF solutions
Publication:
Effect of anions on copper outplating from HF solutions
Date
1996
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
1500.pdf
149.46 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Teerlinck, Ivo
;
Mertens, Paul
;
Vos, Rita
;
Meuris, Marc
;
Heyns, Marc
Journal
Abstract
Description
Metrics
Views
1960
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations
Metrics
Views
1960
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations