Publication:

WS2 transistors on 300 mm wafers with BEOL compatibility

Date

2017

Proceedings Paper

Simple item page Full metadata Statistics

Files

35942.pdf 3.18 MB

Author(s)

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Groven, Benjamin

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Devriendt, Katia

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Delabie, Annelies

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Chiappe, Daniele

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Asselberghs, Inge

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Huyghebaert, Cedric

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Juncker, Aurélie

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Metrics

2 since deposited on 2021-10-24

Acq. date: 2025-12-10

1982 since deposited on 2021-10-24

Acq. date: 2025-12-10