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Extending the Cu metallization and alternatives
Publication:
Extending the Cu metallization and alternatives
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Date
2017
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
van der Veen, Marleen
;
Jourdan, Nicolas
;
Vega Gonzalez, Victor
;
Vandersmissen, Kevin
;
Wilson, Chris
;
Varela Pedreira, Olalla
;
Boemmels, Juergen
;
Struyf, Herbert
;
Tokei, Zsolt
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2035
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Acq. date: 2025-12-16
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Views
2035
since deposited on 2021-10-24
3
last month
3
last week
Acq. date: 2025-12-16
Citations