Publication:

Extending the Cu metallization and alternatives

Date

2017

Proceedings Paper

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Author(s)

van der Veen, Marleen

;

Jourdan, Nicolas

;

Vega Gonzalez, Victor

;

Vandersmissen, Kevin

;

;

Varela Pedreira, Olalla

;

Boemmels, Juergen

;

Struyf, Herbert

;

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2045 since deposited on 2021-10-24

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Acq. date: 2026-04-06