Neuropixels probe: A 130nm/55nm CMOS-based integrated Multimodal Microsystems Technology Platform for large scale Brain Wide Recording

Abstract

We report on the progress in multimodal high resolution integrated neural interfaces with a focus on the Neuropixels probes. Historically, the number of neurons recorded simultaneously follows a Moore's law like behavior, with numbers doubling every 6.7 years. Traditional approaches to probe fabrication have failed to meet the needs of scaling needs of neural recording. The Neuropixels platform, is a custom 130nm/55nm CMOS wafer scale process technology that enables electrode counts beyond the 1000's, enabling system level simultaneous recording of tens of thousands of neurons with single neuron spatial precision and millisecond timing resolution. This required the utilization of multilevel BEOL technology and integrating analog and digital circuitry with the electrode array, making it a standalone integrated electrophysiological micro-system. Recently, we have added a switchable two-color visible photonics module that enables cell specific stimulation and responsive electro-physiology using opto-genetics. In addition, we have added 3D-integration modules which allows die-to-wafer attachment and have extended the platform to the 55nm node to enable higher electrode and recording density. These enable the recording of 10,000 neurons in a chronic freely moving animal and 40,000 neurons in an acute headfixed set-up.