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MILP-based optimization of 2-D block masks for timing-aware dummy segment removal in self-aligned multiple patterning layouts

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1823 since deposited on 2021-10-24
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Acq. date: 2026-10-08

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1823 since deposited on 2021-10-24
4last month
3last week
Acq. date: 2026-10-08

Citations