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MILP-based optimization of 2-D block masks for timing-aware dummy segment removal in self-aligned multiple patterning layouts

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1818 since deposited on 2021-10-24
1last month
Acq. date: 2025-12-10

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1818 since deposited on 2021-10-24
1last month
Acq. date: 2025-12-10

Citations