Publication:

Impact of sequential infiltration synthesis (SIS) on roughness and stochastic nano-failures for EUVL patterning

Date

2019
Proceedings Paper
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

31915.pdf 919.56 KB

Author(s)

Vanelderen, Pieter  
;
Blanco, Victor  
;
Mao, Ming  
;
Tomczak, Yoann  
;
De Roest, David  
;
Kissoon, Nicola
;
Rincon Delgadillo, Paulina  
;
Rispens, Gijsbert  
;
Schiffelers, Guido  
;
Pathak, Abhinav  
;
Lazzarino, Frederic  
;
De Simone, Danilo  
;
De Poortere, Etienne  
;
Mc Manus, Moyra  
;
Piumi, Daniele  
;
Hendrickx, Eric  
;
Vandenberghe, Geert  

Journal

Abstract

Description

Metrics

Views

1932 since deposited on 2021-10-27
1last month
Acq. date: 2026-01-07

Citations

Metrics

Views

1932 since deposited on 2021-10-27
1last month
Acq. date: 2026-01-07

Citations