Publication:

Impact of sequential infiltration synthesis (SIS) on roughness and stochastic nano-failures for EUVL patterning

Date

2019
Proceedings Paper
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Author(s)

Vanelderen, Pieter  
;
Blanco, Victor  
;
Mao, Ming  
;
Tomczak, Yoann  
;
De Roest, David  
;
Kissoon, Nicola
;
Rincon Delgadillo, Paulina  
;
Rispens, Gijsbert  
;
Schiffelers, Guido  
;
Pathak, Abhinav  
;
Lazzarino, Frederic  
;
De Simone, Danilo  
;
De Poortere, Etienne  
;
Mc Manus, Moyra  
;
Piumi, Daniele  
;
Hendrickx, Eric  
;
Vandenberghe, Geert  

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1929 since deposited on 2021-10-27
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1929 since deposited on 2021-10-27
Acq. date: 2025-10-24

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