Publication:

Impact of sequential infiltration synthesis (SIS) on roughness and stochastic nano-failures for EUVL patterning

Date

2019

Proceedings Paper

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31915.pdf 919.56 KB

Author(s)

Vanelderen, Pieter

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;

;

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De Roest, David

;

Kissoon, Nicola

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Rincon Delgadillo, Paulina

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Rispens, Gijsbert

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Schiffelers, Guido

;

Pathak, Abhinav

;

Lazzarino, Frederic

;

De Simone, Danilo

;

De Poortere, Etienne

;

Mc Manus, Moyra

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;

Hendrickx, Eric

;

Vandenberghe, Geert

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1938 since deposited on 2021-10-27

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Acq. date: 2026-02-26