Publication:

A fully packaged electromagnetic microrelay

Date

1999
Proceedings Paper
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dc.contributor.authorTilmans, Harrie
dc.contributor.authorFullin, E.
dc.contributor.authorZiad, Hocine
dc.contributor.authorVan De Peer, Myriam
dc.contributor.authorKesters, J.
dc.contributor.authorVan Geffen, E.
dc.contributor.authorBergqvist, J.
dc.contributor.authorPantus, M.
dc.contributor.authorBeyne, Eric
dc.contributor.authorBaert, Kris
dc.contributor.authorNaso, F.
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorZiad, Hocine
dc.contributor.imecauthorVan De Peer, Myriam
dc.contributor.imecauthorBeyne, Eric
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.date.accessioned2021-10-14T11:43:15Z
dc.date.available2021-10-14T11:43:15Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3881
dc.source.beginpage25
dc.source.conferenceProceedings of MEMS
dc.source.conferencedate17/01/1999
dc.source.conferencelocationOrlando, FL USA
dc.source.endpage30
dc.title

A fully packaged electromagnetic microrelay

dc.typeProceedings paper
dspace.entity.typePublication
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