Publication:

Extraction of physical parameters of alternative high-k gate stacks through comparison between measurements and quantum simulations

Date

 
dc.contributor.authorCampera, A.
dc.contributor.authorIannaccone, G.
dc.contributor.authorCrupi, F.
dc.contributor.authorGroeseneken, Guido
dc.contributor.imecauthorGroeseneken, Guido
dc.date.accessioned2021-10-16T00:52:10Z
dc.date.available2021-10-16T00:52:10Z
dc.date.issued2005-04
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10173
dc.source.beginpage35
dc.source.conference6th European Conference on Ultimate Integration of Silicon - ULIS
dc.source.conferencedate7/04/2005
dc.source.conferencelocationBologna Italy
dc.source.endpage38
dc.title

Extraction of physical parameters of alternative high-k gate stacks through comparison between measurements and quantum simulations

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections: