Interpretation of macropore shape transformation in crystalline silicon upon high temperature processing

dc.contributor.author	Ghannam, Moustafa
dc.contributor.author	Alomar, Abdulazeez
dc.contributor.author	Poortmans, Jef
dc.contributor.author	Mertens, Robert
dc.contributor.imecauthor	Ghannam, Moustafa
dc.contributor.imecauthor	Poortmans, Jef
dc.contributor.imecauthor	Mertens, Robert
dc.contributor.orcidimec	Poortmans, Jef::0000-0003-2077-2545
dc.date.accessioned	2021-10-18T16:31:54Z
dc.date.available	2021-10-18T16:31:54Z
dc.date.issued	2010-10
dc.identifier.issn	0021-8979
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/17143
dc.source.beginpage	74902
dc.source.issue	7
dc.source.journal	Journal of Applied Physics
dc.source.volume	108
dc.title	Interpretation of macropore shape transformation in crystalline silicon upon high temperature processing
dc.type	Journal article
dspace.entity.type	Publication
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