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Aqueous solution–gel preparation of ultrathin ZrO2 films for gate dielectric application
Publication:
Aqueous solution–gel preparation of ultrathin ZrO2 films for gate dielectric application
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Date
2008
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hardy, An
;
Van Elshocht, Sven
;
Adelmann, Christoph
;
Conard, Thierry
;
Franquet, Alexis
;
Douheret, Olivier
;
Haeldermans, Ilse
;
D'Haen, Jan
;
De Gendt, Stefan
;
Caymax, Matty
;
Heyns, Marc
;
D'Olieslaeger, Marc
;
Van Bael, Marlies
;
Mullens, J.
Journal
Thin Solid Films
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1971
since deposited on 2021-10-17
Acq. date: 2026-01-11
Citations
Metrics
Views
1971
since deposited on 2021-10-17
Acq. date: 2026-01-11
Citations