Publication:

Aqueous solution–gel preparation of ultrathin ZrO2 films for gate dielectric application

Date

2008
Journal article
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Author(s)

Hardy, An  
;
Van Elshocht, Sven  
;
Adelmann, Christoph  
;
Conard, Thierry  
;
Franquet, Alexis  
;
Douheret, Olivier
;
Haeldermans, Ilse
;
D'Haen, Jan  
;
De Gendt, Stefan  
;
Caymax, Matty  
;
Heyns, Marc  
;
D'Olieslaeger, Marc  
;
Van Bael, Marlies  
;
Mullens, J.

Journal

Thin Solid Films

Abstract

Description

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1971 since deposited on 2021-10-17
Acq. date: 2026-03-15

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1971 since deposited on 2021-10-17
Acq. date: 2026-03-15

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