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Aqueous solution–gel preparation of ultrathin ZrO2 films for gate dielectric application
Publication:
Aqueous solution–gel preparation of ultrathin ZrO2 films for gate dielectric application
Date
2008
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hardy, An
;
Van Elshocht, Sven
;
Adelmann, Christoph
;
Conard, Thierry
;
Franquet, Alexis
;
Douheret, Olivier
;
Haeldermans, Ilse
;
D'Haen, Jan
;
De Gendt, Stefan
;
Caymax, Matty
;
Heyns, Marc
;
D'Olieslaeger, Marc
;
Van Bael, Marlies
;
Mullens, J.
Journal
Thin Solid Films
Abstract
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Views
1966
since deposited on 2021-10-17
419
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations
Metrics
Views
1966
since deposited on 2021-10-17
419
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations