Publication:
Advanced metal semiconductor contacts for 14nm CMOS technology and beyond
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Acq. date: 2026-04-28
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Acq. date: 2026-04-28
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1 since deposited on 2021-10-28
Acq. date: 2026-04-28
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2307 since deposited on 2021-10-28
8last month
3last week
Acq. date: 2026-04-28
Citations