Publication:
Evaluation of cleaning recipes based on ozonated water for pre-gate oxide cleaning
Date
| dc.contributor.author | Jeon, J. S. | |
| dc.contributor.author | Ogle, B. | |
| dc.contributor.author | Baeyens, Martien | |
| dc.contributor.author | Mertens, Paul | |
| dc.contributor.imecauthor | Mertens, Paul | |
| dc.date.accessioned | 2021-09-30T12:16:36Z | |
| dc.date.available | 2021-09-30T12:16:36Z | |
| dc.date.issued | 1998 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2652 | |
| dc.source.conference | 4th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS | |
| dc.source.conferencedate | 21/09/1998 | |
| dc.source.conferencelocation | Oostende Belgium | |
| dc.title | Evaluation of cleaning recipes based on ozonated water for pre-gate oxide cleaning | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |