Publication:

Ultrascaled graphene-capped interconnects: a quantum mechanical study

Date

2023
Proceedings Paper
https://doi.org/10.1109/IITC/MAM57687.2023.10154656
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dc.contributor.authorReyntjens, Peter
dc.contributor.authorVan de Put, Maarten
dc.contributor.authorVandenberghe, William G.
dc.contributor.authorSoree, Bart
dc.contributor.imecauthorReyntjens, Peter
dc.contributor.imecauthorVan de Put, Maarten
dc.contributor.imecauthorSoree, Bart
dc.contributor.orcidimecVan de Put, Maarten::0000-0001-9179-6443
dc.contributor.orcidimecSoree, Bart::0000-0002-4157-1956
dc.date.accessioned2023-10-13T07:55:44Z
dc.date.available2023-08-07T17:07:38Z
dc.date.available2023-10-13T07:55:44Z
dc.date.embargo9999-12-31
dc.date.issued2023
dc.identifier.doi10.1109/IITC/MAM57687.2023.10154656
dc.identifier.eisbn979-8-3503-1097-9
dc.identifier.issn2380-632X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42299
dc.publisherIEEE
dc.source.conferenceIEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM)
dc.source.conferencedateMAY 22-25, 2023
dc.source.conferencelocationDresden
dc.source.journalna
dc.source.numberofpages3
dc.subject.keywordsELECTRICAL-RESISTIVITY MODEL
dc.subject.keywordsPOLYCRYSTALLINE FILMS
dc.subject.keywordsREFLECTION
dc.title

Ultrascaled graphene-capped interconnects: a quantum mechanical study

dc.typeProceedings paper
dspace.entity.typePublication
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