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Deposition of 60nm thin Sr0.8Bi2.2Ta2O9 layers for application in scaled 1T1C and 1T FeRAM devices
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Deposition of 60nm thin Sr0.8Bi2.2Ta2O9 layers for application in scaled 1T1C and 1T FeRAM devices
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Date
2005-06
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Goux, Ludovic
;
Xu, Zhen
;
Kaczer, Ben
;
Groeseneken, Guido
;
Wouters, Dirk
Journal
Microelectronic Engineering
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1857
since deposited on 2021-10-16
Acq. date: 2026-01-26
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Views
1857
since deposited on 2021-10-16
Acq. date: 2026-01-26
Citations