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Hydrogen plasma-enhanced thermal donor formation in n-type oxygen-doped high-resistivity float-zone silicon
Publication:
Hydrogen plasma-enhanced thermal donor formation in n-type oxygen-doped high-resistivity float-zone silicon
Date
2002
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Simoen, Eddy
;
Claeys, Cor
;
Job, R.
;
Ulyashin, A.G.
;
Fahrner, W.R.
;
De Gryse, O.
;
Clauws, P.
Journal
Applied Physics Letters
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1960
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1960
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations