Low frequency noise analysis as a diagnostic tool to assess the quality of 0.25 μm Ti-silicided poly-lines..

dc.contributor.advisor	test
dc.contributor.author	Vandamme, Ewout
dc.contributor.author	De Wolf, Ingrid
dc.contributor.author	Lauwers, Anne
dc.contributor.author	Vandamme, Lorenz
dc.contributor.imecauthor	De Wolf, Ingrid
dc.contributor.imecauthor	Lauwers, Anne
dc.contributor.orcidimec	De Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned	2021-10-01T09:25:30Z
dc.date.available	2021-10-01T09:25:30Z
dc.date.embargo	9999-12-31
dc.date.issued	1998
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/3074
dc.source.beginpage	925
dc.source.endpage	929
dc.source.issue	6_8
dc.source.journal	Microelectronics Reliability
dc.source.volume	38
dc.title	Low frequency noise analysis as a diagnostic tool to assess the quality of 0.25 μm Ti-silicided poly-lines..
dc.type	Journal article
dspace.entity.type	Publication
Files
Publication available in collections:	Articles