Publication:

SrTiO3 for sub-20 nm DRAM technology nodes – characterization and modeling

Date

2014
Proceedings Paper
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dc.contributor.authorKaczer, Ben
dc.contributor.authorLarcher, Luca
dc.contributor.authorVandelli, Luca
dc.contributor.authorResinger, Hans
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorClima, Sergiu
dc.contributor.authorJi, Zhigang
dc.contributor.authorJoshi, Saumya
dc.contributor.authorSwerts, Johan
dc.contributor.authorRedolfi, Augusto
dc.contributor.authorAfanasiev, Valeri
dc.contributor.authorJurczak, Gosia
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorClima, Sergiu
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorRedolfi, Augusto
dc.contributor.imecauthorAfanasiev, Valeri
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecClima, Sergiu::0000-0002-4044-9975
dc.contributor.orcidimecPopovici, Mihaela Ioana::0000-0002-9838-1088
dc.contributor.orcidimecAfanasiev, Valeri::0000-0001-5018-4539
dc.date.accessioned2021-10-22T02:25:22Z
dc.date.available2021-10-22T02:25:22Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24022
dc.source.beginpagena
dc.source.conferenceIEEE Semiconductor Interfaces Specialist Conference - SISC
dc.source.conferencedate10/12/2014
dc.source.conferencelocationSan Diego, CA USA
dc.title

SrTiO3 for sub-20 nm DRAM technology nodes – characterization and modeling

dc.typeProceedings paper
dspace.entity.typePublication
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