Publication:

Impact of the TiN metal gate thickness on gate induced floating body effect

Date

2009
Proceedings Paper
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dc.contributor.authorRodrigues, Michele
dc.contributor.authorMartino, J.A.
dc.contributor.authorCollaert, Nadine
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.accessioned2021-10-18T02:18:04Z
dc.date.available2021-10-18T02:18:04Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16110
dc.source.beginpage131
dc.source.conference5th EUROSOI Workshop
dc.source.conferencedate19/01/2009
dc.source.conferencelocationGöteborg Sweden
dc.source.endpage132
dc.title

Impact of the TiN metal gate thickness on gate induced floating body effect

dc.typeProceedings paper
dspace.entity.typePublication
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