Publication:

Multifunctional Top-Coats Strategy for DSA of High-chi Block Copolymers

Date

2021
Journal article
https://doi.org/10.2494/photopolymer.34.11
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Author(s)

Chevalier, Xavier
;
Correia, Cindy Gomes
;
Pound-Lana, Gwenaelle
;
Bezard, Philippe  
;
Serege, Matthieu
;
Petit-Etienne, Camille
;
Gay, Guillaume
;
Cunge, Gilles
;
Cabannes-Boue, Benjamin
;
Nicolet, Celia
;
Navarro, Christophe
;
Cayrefource, Ian
;
Mueller, Marcus
;
Hadziioannou, Georges
;
Iliopoulos, Ilias
;
Fleury, Guillaume
;
Zelsmann, Marc

Journal

JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY

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