Multifunctional Top-Coats Strategy for DSA of High-chi Block Copolymers

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Published version 1.03 MB

Author(s)

Chevalier, Xavier

;

Correia, Cindy Gomes

;

Pound-Lana, Gwenaelle

;

Bezard, Philippe

;

Serege, Matthieu

;

Petit-Etienne, Camille

;

;

;

Cabannes-Boue, Benjamin

;

;

Navarro, Christophe

;

Cayrefource, Ian

;

Mueller, Marcus

;

Hadziioannou, Georges

;

Iliopoulos, Ilias

;

Fleury, Guillaume

;

Journal

JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY

Metrics

1177 since deposited on 2023-06-20

Acq. date: 2025-10-23