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Phase formation and morphology of nickel silicide thin films synthesized by catalyzed chemical vapor reaction of nickel with silane

Date

2015
Journal article
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dc.contributor.authorPeter, Antony
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorRichard, Olivier
dc.contributor.authorMoussa, Alain
dc.contributor.authorSteenbergen, Johnny
dc.contributor.authorSchaekers, Marc
dc.contributor.authorTokei, Zsolt
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorAdelmann, Christoph
dc.contributor.imecauthorPeter, Antony
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorSteenbergen, Johnny
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.date.accessioned2021-10-22T21:47:23Z
dc.date.available2021-10-22T21:47:23Z
dc.date.issued2015
dc.identifier.issn0897-4756
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25753
dc.identifier.urlhttp://pubs.acs.org/doi/abs/10.1021/cm503810p
dc.source.beginpage245
dc.source.endpage254
dc.source.issue1
dc.source.journalChemistry of Materials
dc.source.volume27
dc.title

Phase formation and morphology of nickel silicide thin films synthesized by catalyzed chemical vapor reaction of nickel with silane

dc.typeJournal article
dspace.entity.typePublication
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