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Iodine enhanced focused-ion-beam etching of silicon for photonic applications
Publication:
Iodine enhanced focused-ion-beam etching of silicon for photonic applications
Date
2007-11
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Schrauwen, Jonathan
;
Van Thourhout, Dries
;
Baets, Roel
Journal
Journal of Applied Physics
Abstract
Description
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1912
since deposited on 2021-10-16
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Acq. date: 2025-10-24
Citations
Metrics
Views
1912
since deposited on 2021-10-16
402
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations